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4200A-SCS

4200A-SCS is a customizable and fully integrated parameter analyzer that can simultaneously view current voltage (I-V), capacitance voltage (C-V), and ultra fast pulse I-V characteristics. As the highest performing parameter analyzer, the 4200A-SCS accelerates the development speed of semiconductors, materials, and processes.

Main performance indicators

I-V Source Measurement Unit (SMU)

● ± 210V/100mA or 210V/1A module

● 100fA measurement resolution

● The optional front-end amplifier provides a measurement resolution of 10aA

● Measurement of ultra-low frequency capacitance from 10mHz to 10Hz

● 100F load capacitor

● Four quadrant operation

● 2-wire or 4-wire connection


C-V Multi Frequency Capacitive Unit (CVU)

● AC impedance measurement (C-V, C-f, C-t)

● 1kHZ-10 MHz frequency range

● ± 30V (60V differential) built-in DC bias source, expandable to 210V (420V differential)

● Optional CVIV multi-channel switch for easy switching between I-V measurement and C-V measurement


Pulse I-V ultra fast pulse measurement unit (PMU)

● Two independent or synchronized high-speed pulses | - V source and measurement channel

● 200MSa/s, 5ns sampling rate

● ± 40V (80Vp-p), 800mA

● Transient waveform capture mode

● Arbitrary waveform generator, supports multi-level pulse waveform, 10ns programmable resolution


High Voltage Pulse Generator Unit (PGU)

● Two high-speed pulse voltage source channels

● ± 40V (80Vp-p), 800mA

● Arbitrary waveform generator, supports multi-level pulse waveform, 10ns programmable resolution


I-V/C-V Multi Channel Switching Module (CVIV)

● Easy switching between | - V measurement and C-V measurement without rewiring or lifting the probe

● Move the C-V measurement to any terminal without rewiring or lifting the probe

● Supports 210VDC bias source


Remote Front End Amplifier/Switch Module (RPM)

● Automatically switch between I-V measurement, C-V measurement, and ultrafast pulse I-V measurement

● Extend the current sensitivity of 4225-PMU to tens of picoamps

● Reduce cable capacitance effect


4200A-SCS instruments and modules

MoldInstructionsMain measurementScopeMeasurement resolution
4200-SMUMedium power source measurement unit

-DCI-V

-Ultra low frequency C-V

-QSCV

±100mA,210V0.2V, 100fA
4201-SMUMedium power source measurement unit improves low current stability
4210-SMUHigh power source measurement unit±1A,210V
4211-SMUHigh power source measurement unit
4200-PARemote front-end amplifier moduleExpand the current range of all SMUs0.2 uV, 10 aA
4210-CVUCapacitive voltage unit

-AC impedance

-C-V,C-f,C-t

1 KHZ-10MHZ

± 30V built-in DC bias device (60V differential) using SMU to extend DC bias voltage to 210V

1aF, inS, . 001 degrees