Full modularity and flexibility
● Precise warpage and CTE measurement on a micron scale across temperature range of RT to 300°C
● Scanning and multiscale available
| Measurement technology | Phase shift projection moiré |
| Camera resolution | 12 Mpixels |
| Data acquisition | <2 second |
Max sample size | 300 x 300 mm |
Min sample size | 0.5 x 0.5 mm |
Max temperature | 300°C |
Min temperature | -65°C (or RT if no subroom module) |
Max heating rate | +2°C/s on typical 14 x 14 x 1,2 mm package |
Min cooling rate | -2°C/s on typical 14 x 14 x 1,2 mm packag |
Homogeneity (*) | <+/-5°C on 150 x 150 mm square zone |
FOV 10 | FOV 30 | FOV 7 | FOV 15 | |
FOV size (mm x mm) | 10 x 12 | 30 x 37 | 70 x 82 | 150 x 187 |
Max amplitude (mm) | 4 | 15 | 15 | 25 |
Z resolution (µm) | <1µm | 1µm | 1,5µm | 2µm |
Accuracy | <1µm or 2% | 1µm or 2% | 1,5µm or 2% | 2µm or 2% |
Density (px/mm2) | 10 000 | 1 600 | 2500 | 400 |
CTE module | Available, for all FOVs from -65°C to 300°C |
Subroom | Available, for all FOVs from -65°C to 300°C |
Scanning | N/A |
Multiscale | N/A |
Foot print L x W x H | 1260 mm x 700 mm x 1950 mm |
WEIGHT | 300 Kg |
ELEC. FACILITIES | 230 V, 1 phase, 40 amps |
AIR REQUIREMENTS | Compressed air and exhaust |
Copyright © 2025 双赢电子科技国际有限公司苏ICP备2025215884号-1 技术支持：汇成传媒
【微信公众号】