Full modularity and flexibility

Precise warpage and CTE measurement on a nano micrometer scale across a temperature range of -65°C to 400°C

● Smaller footprint

● Noise level < 50 dB

● Redesigned oven

● New CTE module with improved resolution

● OCT sensor enabling nano-resolution measurement on transparent, semitransparent, and glossy surfaces

● Precise warpage and CTE measurement on a nano micrometer scale across a temperature range of -65°C to 400°C

Full modularity and flexibility

●　Precise warpage and CTE measurement on a micron scale across temperature range of RT to 300°C

●　Scanning and multiscale available

Full modularity and flexibility

●　Precise warpage and CTE measurement on a micron scale across temperature range of RT to 300°C

●　Scanning and multiscale available