Dual PHEMOS-X is designed specifically for advanced 3D non transparent devices, where optical fault analysis may need to be performed simultaneously on both sides (top and bottom) at the wafer or chip level.
● Analysis on both sides
● It is easy to switch between top fault analysis and bottom fault analysis without moving the device to another system/instrument.
It is easy to switch between top fault analysis and bottom fault analysis without moving the device to another system/instrument.
The working range of the optical stage
| X | Y | Z | |
| Top | 40 mm | 40 mm | 80 mm |
| Bottom | 60 mm | 60 mm | 20 mm |
*Due to the use of probe stations and interference from sample stations or NanoLens installations, the working range may be narrower than these values.
Main functions
• XY stage control
• Z. Theta Control
| X | 300 mm |
| >Y | 300 mm |
| >Z | 22.5 mm |
| >θ | +/- 5° |
• Wafer mapping function
• Alignment function
Dual PHEMOS-X Overlay low light images onto high-resolution pattern images to quickly locate defect points.
The contrast enhancement function makes the image clearer and more delicate.
Display function
Comment: Comments, arrows, and other indicators can be displayed anywhere on the image as needed.
Scale display: The scale width can be displayed in segments on the image.
Grid display: Vertical and horizontal grid lines can be displayed on the image.
Thumbnail display: Images can be stored and accessed in the form of thumbnails. It can display image information such as platform coordinates.
Split screen display: It can display pattern images, low light images, overlay images, and reference images all at once on a 6-window screen.
| Size | Host: 1900 mm (W) × 2200 mm (H) × 1350 mm (D), approximately 2335 kg System rack: 1060 mm (W) × 1841.5 mm (H) × 715 mm (D), approximately 370 kg Probe stand frame: 800 mm (W) x 1800 mm (H) x 650 mm (D), approximately 360 kg |
| Line voltage | Single phase 200 V~AC 240 V 50 Hz/60 Hz |
| Power consumption | Approximately 3300 VA (system rack)/Approximately 4400 VA (probe station rack) |
| Degree of vacuum | -40 kPa ～ -80 kPa |
| Compressed air | 0.5 MPa ～ 0.7 MPa |
*1 Including regulators
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