Triglav™ Ultra high resolution field emission tube

▪ Schottky field emission electron gun with an expected lifespan of at least 2 years

▪ Triglav ™  The lens barrel adopts TriLens ™  Three objective lens design

▪ Indoor SE and BSE detectors for samples*

▪ SE detector inside the tube, BSE detector inside the tube, and mid angle BSE detector

▪ Electron beam landing energy: 200eV – 30 keV (<50eV * in deceleration mode)

▪ Optimizing beam spot through electromagnetic aperture

▪ Probe current: 2pA -400nA, continuously adjustable

▪ Field of view: 4.3 mm @ WD=5 mm (analysis working distance)

                         7 mm @ WD=30 mm

▪ Magnification: 4-2000000 times

Resolving power:

▪ 1.2 nm @ 1 keV

▪ 0.9 nm @ 1 keV (Deceleration mode)*

▪ 0.6 nm @ 15 keV

▪ 0.5 nm @ 30 keV, STEM detector

Low vacuum resolution

▪ 1.5 nm @ 30 keV, GSD detector*

▪ 3.0 nm @ 3 keV, GSD detector*

LM type sample room

▪ Internal diameter: 230mm

▪ Number of interfaces: 12+

▪ Shock absorption type: active (built-in)

▪ Infrared camera for observing the internal conditions of the sample room

▪ The second infrared camera*

▪ Integrated plasma cleaner

LM type sample stage

5-axis computer-controlled optimization center motor-driven sample stage

▪ X and Y axis travel: 80 (x) × 60 (y) mm

▪ Z-axis travel: 44 mm

▪ Tilt: computer-controlled center type, -80 ° to+80 °

▪ Rotation: computer-controlled center of gravity, 360 degrees (continuous)

▪ Maximum sample height * 1:39 mm (65 mm without rotary table installed)

▪ Maximum sample size: diameter 100 mm, XY axis movement and rotation are not affected, cannot tilt (placing larger samples may limit movement and rotation)

▪ Maximum sample weight: 1000 g

   ▪ Five axis (XYZRT) mobile load-bearing capacity: 500 g

   ▪ Three axis (XYZ) mobile load-bearing capacity: 1000 g

GM type sample room

▪ Width: 340 mm

▪ Depth: 315 mm

▪ Number of interfaces: 20+

▪ Shock absorption type: active (built-in)

▪ Expansion: Used for 6 "and 8" wafers*

▪ Expansion: Used for 6 ", 8", and 12 "wafers (requires installation of a cradle style sample stage)*

▪ Extension: Used for Combined Raman Spectrometer (RISE) ™)*

▪ Infrared camera for observing the internal conditions of the sample room

▪ The second infrared camera*

▪ Integrated plasma cleaner

GM type sample stage

5-axis computer-controlled optimization center motor-driven sample stage

▪ X and Y axis travel: 130 mm

▪ Z-axis travel: 96 mm

▪ Tilt: computer-controlled center type, -70 ° to+90 °

▪ Rotation: computer-controlled center of gravity, 360 degrees (continuous)

▪ Maximum sample height * 1: 92 mm (133 mm, without installing a rotating table)

▪ Maximum sample size: diameter 180 mm, XY axis movement and rotation are not affected, cannot tilt (placing larger samples may limit movement and rotation)

▪ Maximum sample weight: 8000g

▪ Five axis (XYZRT) mobile load-bearing capacity: 1000g

▪ Three axis (XYZ) mobile load-bearing capacity: 8000g

▪ Cradle style sample stand*

Note: The range of movement depends on the actual configuration and the WD/Z at that time.

Vacuum system

▪ High vacuum:<1x10-3 Pa

▪ MultiVac（N2，H2O）*: 7–500 Pa

▪ Pre pump: oil-free dry pump

▪ Sample pre extraction chamber (manual or motor automatic)*

▪ Cooling circulating water equipment

Detector and accessories

▪ Pian meter, including anti-collision alarm function

▪ Everhart Thornley detector (SE) in the sample room

▪ In-Beam SE/ Mid-Angle BSE

▪ In-Beam f-BSE

▪ Mid-angle BSE

▪ Low vacuum secondary electron detector (GSD), used under variable vacuum MultiVac*

▪ Scalable (motor-driven) - scintillation type backscattered electron detector (R-BSE)*

▪ Scalable (motor-driven) - High sensitivity scintillation type backscattered electron detector (LE BSE)*

▪ Scalable (motor-driven) - High sensitivity four segment solid-state backscattered electron detector (4Q LE-BSE)*

▪ Scalable (motor-driven) - scintillation type water-cooled backscattered electron detector, heat-resistant temperature<800 ° C, (Water Cooled BSE)*

▪ Scalable (motor-driven) - scintillation aluminum plated backscattered electron detector, capable of simultaneously receiving cathodoluminescence (CL) and backscattered electron signals, (Al coated BSE)*

▪ Scalable (manual) - Integrated Cathodic Fluorescence Detector (CL), 350-650 nm*

▪ Scalable (manual) - Integrated Cathodic Fluorescence Detector (CL), 185-850 nm*

▪ Scalable (manual) - Integrated Color Cathodic Fluorescence Detector (Rainbow CL)*

▪ Scalable Cathodic Fluorescence Detector (CL), 350-650 nm*

▪ Scalable Cathodic Fluorescence Detector (CL), 185-850 nm*

▪ Scalable Cathodic Fluorescence Detector (CL)*

▪ Scalable (motor-driven) - Scanning Transmission Electron Detector (HADF R-STEM *), capable of receiving bright field (BF), dark field (DF), and high angle dark field (HADF) signals, providing a fixture for placing up to 8 TEM grid sample stages

▪ Optical navigation and integrated camera (ONCam) * 2

▪ Energy dispersive spectroscopy (EDS) * (third-party)

▪ Backscatter Electron Diffraction (EBSD) * (Third Party)

▪ Spectrometer (WDS) * (third-party)

Attachment

▪ Electron beam exposure*

▪ Electrostatic beam gate of SEM tube*

▪ TESCAN Essence ™  EBL kit*

▪ TESCAN Flow ™  EBL offline software*

Electron microscope control accessories and user interface:

▪ Residence time: 20ns – 10ms, step or continuous adjustable

▪ Full image scan, selected area scan, line or point scan

▪ Image drift, scan rotation, and tilt compensation

▪ Frame accumulation, line accumulation

▪ Frame Accumulation Drift Correction (DCFA)

▪ Dynamic Focus

Image acquisition

▪ Maximum image pixels: 16k × 16k

▪ Aspect ratio: 1:1, 4:3, or 2:1

▪ Image stitching * (Essence optional) ™  Automatic puzzle software

▪ Capable of supporting up to 8 real-time signal channels simultaneously, including real-time pseudo color images and multi-channel signals

▪ Mix

▪ Image formats: TIFF, PNG, BMP, JPEG, and GIF

▪ Dynamic range: 8-bit or 16 bit

SEM scanning system

▪ Keyboard and Mouse

▪ Trackball

▪ Multi functional control board*

▪ TESCAN Electron Microscope Special Control Software Essence ™

Computer

▪ High performance configuration: Intel Core i7 or equivalent processor, 16 GB RAM,

▪ 2 TB hard drive, Nvidia GTX 1060 or equivalent graphics card,

▪ Windows 10 Pro 64 bit (detailed information can be provided upon request).

▪ 32 "QHD monitor

TESCAN Essence ™  software

▪ Highly customizable interface layout

▪ Multi user management software system

▪ Quick search bar

▪ Revoke/redo function

▪ Real time display of single, double, four or six images

▪ Multi channel real-time pseudo color image

Automated and Semi Automated Functions

▪ Electronic gun automatically starts

▪ Electron gun and tube alignment

▪ Contrast and brightness, autofocus

▪ In-Flight Beam Tracing™

▪ Optimization of electron beam spot

Advanced Essence ™  software

■ Measurement software, tolerance measurement software

■ Image processing

■ Preset parameters

■ Histogram and LUT

■ SharkSEM ™  Standard version (remote control)

■ 3D anti-collision model software

■ Object area

■ Optoelectronic combination

■ Scheduled shutdown

■ CORAL ™ (Electron microscopy software module for life sciences)*

■ Defect navigation

■ Automatic puzzle software*

■ Sample observation*

■ SharkSEM ™  Advanced Edition (Script Editing)*

■ System inspection*

■ Synopsys client*

■ TESCAN Flow ™  (Offline processing software)*

Electron microscope installation

Installation requirement 1:

▪ Power supply: 230V ± 10%/50Hz (or 120 V/60Hz - optional), power 2300 VA+1000 VA (main unit+chiller)

▪ Compressed air: 6-7 bar (87-102 psi), required to be clean, dry, and oil-free

▪ Compressed nitrogen gas for vacuum release: 1-7 bar (15-102 psi), purity of 99.99% or better (4.0 N)

▪ Installation space: minimum space of 3.8 × 3.1 m; door width not less than 0.9 m (if optional installation of R-STEM detector or motor-driven sample pre extraction chamber, door width not less than 1.0 m is required)

1. Site measurements must be conducted by technicians authorized by TESCAN.

Environmental requirement 2:

▪ Environmental temperature: 17-24 ° C, with stable temperature changes within 2 ° C and hourly temperature fluctuations of less than 1 ° C

▪ Relative humidity:<65%

▪ Magnetic field: synchronous<300 nT, asynchronous<100 nT

▪ Vibration:<10 μm/s (<30 Hz), <20 μm/s (≥30 Hz)

▪ Noise:<60dBC

▪ Altitude: no more than 3000 m

2 The parameters of the magnetic field will be affected by the actual acceleration voltage, and the acceleration voltage measured here is 20 kV.

Train:

▪ Basic training: TESCAN engineers complete on-site installation of equipment.

▪ Advanced training (optional): TESCAN China demonstration center or user site.

Electron Microscope Layout (Unit: mm)

If the mechanical pump and TESCAN MAGNA electron microscope are placed in the same room, it is recommended to purchase a TESCAN static speaker (ordered separately) along with the electron microscope.